Wafer Ön Uç Modülü 300mm

BROOKS ASYST Spartan EFEM Sorter

Brooks Automation Wafer Front-End Module, 300mm, ASYST Spartan EFEM, Sorter

Model: ASYST Spartan EFEM
Type: Sorter
Condition: Used

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Technical Data:
100-240V AC
50/60Hz
10A

General Information:
300-mm EFEM with 3 loadports, cleanroom mini-environment, and integrated wafer transfer robot

This device is an Equipment Front End Module (EFEM) from the ASYST Spartan series, developed for fully automated handling of 300-mm silicon wafers in semiconductor manufacturing. It features three loadports, a mini-environment with ULPA air filters, internal lighting, comprehensive safety controls, and all required interfaces for system integration. Additionally, a fully integrated wafer transfer robot is installed that removes wafers from the FOUP/cassette loadports, separates them, and hands them over precisely to subsequent process modules.

Year of Manufacture: 27.12.2010
Including CD with operating, service and installation manuals (9701-3060-01 Rev G)

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